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Edwards iXL and iXH spare parts

Dry vacuum pumps for harsh semiconductor and industrial processes.

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Parts for Edwards iXL and iXH

48 parts

  • A50717000 Stainless steel water fitting, 1/4 inch BSPP straight quick connect Edwards · Tubing and fittings
    Refurbished, Used On request
  • A50721000 Stainless steel water fitting, 3/8 inch BSPP straight quick connect Edwards · Tubing and fittings
    Refurbished, Used On request
  • A50738000 Water Flow Control Valve Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A50739000 Water flow control valve kit Edwards · Valves
    Refurbished, Used On request
  • A50769000 Retrofit Kit for iXH1210 and iXH1210H (replaces iH1000) Edwards · Other parts
    Refurbished, Used On request
  • A50770000 Retrofit Kit for iXH1220H (replaces iH1000) Edwards · Other parts
    Refurbished, Used On request
  • A50784000 Nitrogen Flow Switch, 0 - 60 slm Edwards · Other parts
    Refurbished, Used On request
  • A50788000 Utilities kit, 380-460V, Harting Han 100A axial screw module mains connector Edwards · Other parts
    Refurbished, Used On request
  • A50789000 Utilities kit, 200-230V, Harting Han 100A axial screw module mains connector Edwards · Other parts
    Refurbished, Used On request
  • A50790000 Exhaust Check Valve Kit, NW50, PTFE Disc Type (for iXL) Edwards · Valves
    Refurbished, Used On request
  • A50791000 Exhaust Extraction Cover Kit, NW50 Exhaust Edwards · Other parts
    Refurbished, Used On request
  • A50795000 Utilities Kit, Harting Han K4/4 Mains Connector Edwards · Other parts
    Refurbished, Used On request
  • A50797000 Nitrogen flow switch assembly Edwards · Other parts
    Refurbished, Used On request
  • A50798010 Extraction port chimney Edwards · Other parts
    Refurbished, Used On request
  • A50799000 Water flow monitor assembly Edwards · Other parts
    Refurbished, Used On request
  • A50804000 Disconnect Box, 200-230V 100A max, Harting Han 100A Axial Screw Module Edwards · Other parts
    Refurbished, Used On request
  • A50806000 Disconnect Box 200-460 V 50-60 Hz Edwards · Other parts
    Refurbished, Used On request
  • A50911016 Seismic brackets (4 off) Edwards · Other parts
    Refurbished, Used On request
  • A54050722 Lifting / seismic / stacking brackets (pair), iXL120 Edwards · Other parts
    Refurbished, Used On request
  • A54100023 Upgrade kit IPX100/100A/CNET to iXL120 Edwards · Other parts
    Refurbished, Used On request
  • A54100024 Upgrade kit IPX180/CNET to iXL120 Edwards · Other parts
    Refurbished, Used On request
  • A54113010 IXL120 Dry Pump E 200-460V, 3/8 QC Water Fittings Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54113011 IXL120 Dry Pump E 200-460V, 3/8 QC Water Fittings, Flow Control Valve Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54113020 IXL120 Dry Pump E 200-460V, 1/4 QC Water Fittings Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54113221 IXL120 Dry Pump E 200-460V SPI, 1/4 QC Water Fittings, Flow Control Valve Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54113610 IXL120 Dry Pump E 200-460V HIT, 3/8 QC Water Fittings Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54113611 IXL120 Dry Pump E 200-460V HIT, 3/8 QC Water Fittings, Flow Control Valve Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54113710 IXL120 Dry Pump E 200-460V MCM, 3/8 QC Water Fittings Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54113711 IXL120 Dry Pump E 200-460V MCM, 3/8 QC Water Fittings, Flow Control Valve Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54114010 IXL120N Dry Pump E 200-460V, 3/8 QC Water Fittings Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54114011 IXL120N Dry Pump E 200-460V, 3/8 QC Water Fittings, Flow Control Valve Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54114020 IXL120N Dry Pump E 200-460V, 1/4 QC Water Fittings Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54114210 IXL120N Dry Pump E 200-460V SPI TIM, 3/8 QC Water Fittings Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54114410 IXL120N Dry Pump E 200-460V TEL, 3/8 QC Water Fittings Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54114411 IXL120N Dry Pump E 200-460V TEL, 3/8 QC Water Fittings, Flow Control Valve Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A541-33-010 IXL600 dry pump 200-460 V 50/60 Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A541-34-010 IXL600N dry pump 200-460 V 50/60 Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A541-53-020 IXL1000 dry pump 200-460 V 50/60 Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A541-54-020 IXL1000N dry pump 200-460 V 50/60 Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • D37207061 EMS Terminator Plug Edwards · Other parts
    Refurbished, Used On request
  • D372-80-700 Pump Display Terminal (PDT) Edwards · Other parts
    Refurbished, Used On request
  • D37370330 EMS interface module TEL Edwards · Other parts
    Refurbished, Used On request
  • D37370340 EMS interface module Semi E73 Edwards · Other parts
    Refurbished, Used On request
  • D37370370 EMS interface module Hitachi Edwards · Other parts
    Refurbished, Used On request
  • D37422802 Connector Kit for MCM MicroTIM Edwards · Other parts
    Refurbished, Used On request
  • D37491500 EMS button Edwards · Other parts
    Refurbished, Used On request
  • D37491501 PDT Adaptor Cable Edwards · Other parts
    Refurbished, Used On request
  • D37491735 Main power connector (3-phase supply and PE), iXL120 Edwards · Other parts
    Refurbished, Used On request

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