Edwards spare parts
Spare parts for Edwards rotary vane, scroll and turbomolecular vacuum pumps. Search by part number or browse by instrument series, then request a quote with the condition you need.
Guides
Edwards instrument series
- Edwards RV205 parts
- Edwards E2M683 parts
- Edwards XDS77 parts
- Edwards nXDS40 parts
- Edwards EcoDry
- Edwards EXT and nEXT204 parts
- Edwards TIC42 parts
- Edwards Active Gauges175 parts
- Edwards iH, iL, iQDP and iXM Dry Pumps429 parts
- Edwards EH Mechanical Boosters377 parts
- Edwards T-Station Pumping Stations6 parts
- Edwards Valves312 parts
- Edwards Diffusion Pumps170 parts
- Edwards EPX and EPS91 parts
- Edwards GXS34 parts
- Edwards iXL and iXH48 parts
- Edwards STP50 parts
Edwards parts by category
- Boards and electronics 23
- Cryopumps 2
- Dry vacuum pumps 440
- Emitters and filaments 2
- Ion sources and interfaces 4
- Leak detectors 36
- Mass spectrometer components 12
- Other parts 1100
- Power supplies 2
- Rotary vane pumps 311
- Seals and consumables 772
- Tubing and fittings 656
- Turbomolecular pumps 126
- Vacuum controllers 92
- Vacuum gauges 177
- Vacuum pumps 273
- Valves 286
Edwards parts
4,314 parts
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B31101400 HT10 Diffusion Pump ANSI10/ANSI2, 400VRefurbished, Used On request
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B31101415 HT10 Diffusion Pump ANSI10/ANSI2, 415VRefurbished, Used On request
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B31101460 HT10 Diffusion Pump ANSI10/ANSI2, 460VRefurbished, Used On request
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B31101480 HT10 Diffusion Pump ANSI10/ANSI2, 480VRefurbished, Used On request
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B31102200 HT10 Diffusion Pump EO12/EHVI130, 200VRefurbished, Used On request
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B31102220 HT10 Diffusion Pump EO12/EHVI130, 220VRefurbished, Used On request
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B31102380 HT10 Diffusion Pump EO12/EHVI130, 380VRefurbished, Used On request
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B31102400 HT10 Diffusion Pump EO12/EHVI130, 400VRefurbished, Used On request
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B31102415 HT10 Diffusion Pump EO12/EHVI130, 415VRefurbished, Used On request
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B31103200 HT10 Diffusion Pump ISO320/ISO63, 200VRefurbished, Used On request
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B31103220 HT10 Diffusion Pump ISO320/ISO63, 220VRefurbished, Used On request
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B31103380 HT10 Diffusion Pump ISO320/ISO63, 380VRefurbished, Used On request
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B31103400 HT10 Diffusion Pump ISO320/ISO63, 400VRefurbished, Used On request
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B31103415 HT10 Diffusion Pump ISO320/ISO63, 415VRefurbished, Used On request
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B31103480 HT10 Diffusion Pump ISO320/ISO63, 480VRefurbished, Used On request
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B31220200 HT16B Diffusion Pump ANSI16/ANSI3, 200VRefurbished, Used On request
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B31220220 HT16B Diffusion Pump ANSI16/ANSI3, 220VRefurbished, Used On request
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B31220380 HT16B Diffusion Pump ANSI16/ANSI3, 380VRefurbished, Used On request
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B31220400 HT16B Diffusion Pump ANSI16/ANSI3, 400VRefurbished, Used On request
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B31220415 HT16B Diffusion Pump, ANSI16/ANSI3, 415VRefurbished, Used On request
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B31220440 HT16B Diffusion Pump, ANSI16/ANSI3, 440VRefurbished, Used On request
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B31220460 HT16B Diffusion Pump, ANSI16/ANSI3, 460VRefurbished, Used On request
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B31220480 HT16B Diffusion Pump, ANSI16/ANSI3, 480VRefurbished, Used On request
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B31222200 HT16B Diffusion Pump, ISO500/ISO100, 200VRefurbished, Used On request
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B31222220 HT16B Diffusion Pump, ISO500/ISO100, 220VRefurbished, Used On request
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B31222380 HT16B Diffusion Pump, ISO500/ISO100, 380VRefurbished, Used On request
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B31222400 HT16B Diffusion Pump, ISO500/ISO100, 400VRefurbished, Used On request
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B31222415 HT16B Diffusion Pump, ISO500/ISO100, 415VRefurbished, Used On request
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B31222440 HT16B Diffusion Pump, ISO500/ISO100, 440VRefurbished, Used On request
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B31222460 HT16B Diffusion Pump, ISO500/ISO100, 460VRefurbished, Used On request
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B31222480 HT16B Diffusion Pump, ISO500/ISO100, 480VRefurbished, Used On request
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B31420200 HT20B Diffusion Pump, ANSI20/ANSI4, 200VRefurbished, Used On request
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B31420220 HT20B Diffusion Pump, ANSI20/ANSI4, 220VRefurbished, Used On request
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B31420380 HT20B Diffusion Pump, ANSI20/ANSI4, 380VRefurbished, Used On request
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B31420400 HT20B Diffusion Pump, ANSI20/ANSI4, 400VRefurbished, Used On request
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B31420415 HT20B Diffusion Pump, ANSI20/ANSI4, 415VRefurbished, Used On request
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B31420440 HT20B Diffusion Pump, ANSI20/ANSI4, 440VRefurbished, Used On request
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B31420460 HT20B Diffusion Pump, ANSI20/ANSI4, 460VRefurbished, Used On request
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B31420480 HT20B Diffusion Pump, ANSI20/ANSI4, 480VRefurbished, Used On request
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B31422200 HT20B Diffusion Pump, ISO630/ISO160, 200VRefurbished, Used On request
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B31422220 HT20B Diffusion Pump, ISO630/ISO160, 220VRefurbished, Used On request
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B31422380 HT20B Diffusion Pump, ISO630/ISO160, 380VRefurbished, Used On request
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B31422400 HT20B Diffusion Pump, ISO630/ISO160, 400VRefurbished, Used On request
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B31422415 HT20B Diffusion Pump, ISO630/ISO160, 415VRefurbished, Used On request
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B31422440 HT20B Diffusion Pump, ISO630/ISO160, 440VRefurbished, Used On request
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B31422460 HT20B Diffusion Pump, ISO630/ISO160, 460VRefurbished, Used On request
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B31422480 HT20B Diffusion Pump ISO630/ISO160, 480VRefurbished, Used On request
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B34431976 Standard Diffstak 63/150M diffusion pump, 110-125 V 1-ph 50/60 HzRefurbished, Used On request