Edwards spare parts
Spare parts for Edwards rotary vane, scroll and turbomolecular vacuum pumps. Search by part number or browse by instrument series, then request a quote with the condition you need.
Guides
Edwards instrument series
- Edwards RV205 parts
- Edwards E2M683 parts
- Edwards XDS77 parts
- Edwards nXDS40 parts
- Edwards EcoDry
- Edwards EXT and nEXT204 parts
- Edwards TIC42 parts
- Edwards Active Gauges175 parts
- Edwards iH, iL, iQDP and iXM Dry Pumps429 parts
- Edwards EH Mechanical Boosters377 parts
- Edwards T-Station Pumping Stations6 parts
- Edwards Valves312 parts
- Edwards Diffusion Pumps170 parts
- Edwards EPX and EPS91 parts
- Edwards GXS34 parts
- Edwards iXL and iXH48 parts
- Edwards STP50 parts
Edwards parts by category
- Boards and electronics 23
- Cryopumps 2
- Dry vacuum pumps 440
- Emitters and filaments 2
- Ion sources and interfaces 4
- Leak detectors 36
- Mass spectrometer components 12
- Other parts 1100
- Power supplies 2
- Rotary vane pumps 311
- Seals and consumables 772
- Tubing and fittings 656
- Turbomolecular pumps 126
- Vacuum controllers 92
- Vacuum gauges 177
- Vacuum pumps 273
- Valves 286
Edwards parts
4,314 parts
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B753-01-991 EXT255H/ISO100 24 V turbomolecular pumpRefurbished, Used On request
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B753-02-000 EXT255H/100CF compound molecular pumpRefurbished, Used On request
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B753-02-991 EXT255H/CF100 24 V turbomolecular pumpRefurbished, Used On request
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B753-03-000 EXT255Hi/ISO100 compound molecular pumpRefurbished, Used On request
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B753-03-991 EXT255Hi/ISO100 24 V turbomolecular pumpRefurbished, Used On request
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B753-05-991 EXT255H/ISO100 24 V turbomolecular pump (coarse inlet screen)Refurbished, Used On request
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B753-07-000 EXT255HVi/ISO100 compound molecular pumpRefurbished, Used On request
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B753-11-000 EXT255DX turbomolecular pump, ISO100Refurbished, Used On request
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B753-12-000 EXT255DX turbomolecular pump, CF100Refurbished, Used On request
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B753-13-000 EXT255iDX turbomolecular pump, ISO100 (interstage)Refurbished, Used On request
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B756-01-000 EXT200/200H Compound Turbomolecular Pump, 80 VRefurbished, Used On request
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B756-01-991 EXT200/200H Compound Turbomolecular Pump, 24 VRefurbished, Used On request
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B756-02-000 EXT200/200Hi Compound Turbomolecular Pump, 80 VRefurbished, Used On request
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B756-02-991 EXT200/200Hi Compound Turbomolecular Pump, 24 VRefurbished, Used On request
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B756-03-000 EXT70/200H Compound Turbomolecular Pump, 80 VRefurbished, Used On request
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B756-03-991 EXT70/200H Compound Turbomolecular Pump, 24 VRefurbished, Used On request
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B756-05-000 EXT200/200H Split-Flow Compound Turbomolecular Pump (80 V)Refurbished, Used On request
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B756-05-991 EXT200/200Hi Split-Flow Compound Turbomolecular Pump (24 V)Refurbished, Used On request
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B756-07-000 EXT200/200H Split-Flow Compound Turbomolecular Pump (80 V)Refurbished, Used On request
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B756-21-000 EXT200/200H 80 V EXT System with EXDC160 ControllerRefurbished, Used On request
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B756-21-991 EXT200/200H 24 V EXT System with EXDC160 ControllerRefurbished, Used On request
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B756-22-000 EXT200/200Hi 80 V EXT System with EXDC160 ControllerRefurbished, Used On request
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B756-22-991 EXT200/200Hi 24 V EXT System with EXDC160 ControllerRefurbished, Used On request
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B756-23-000 EXT70/200H 80 V EXT System with EXDC160 ControllerRefurbished, Used On request
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B756-23-991 EXT70/200H 24 V EXT System with EXDC160 ControllerRefurbished, Used On request
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B756-25-000 EXT200/200Hi Split-Flow Compound Turbomolecular Pump (80 V)Refurbished, Used On request
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B756-25-991 EXT200/200Hi Split-Flow Compound Turbomolecular Pump (24 V)Refurbished, Used On request
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B756-26-991 EXT200/200H Split-Flow Compound Turbomolecular Pump (24 V)Refurbished, Used On request
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B756-28-000 EXT200/200H Split-Flow Compound Turbomolecular Pump (80 V)Refurbished, Used On request
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B756-30-000 EXT200/200H ICPMS Compound Turbomolecular Pump, 80 VRefurbished, Used On request
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B756-30-991 EXT200/200H ICPMS 24 V EXT System with EXDC160 ControllerRefurbished, Used On request
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B756-40-813 ISX inlet screen 2.5 mm hexagonal for EXT406PX, DN100 ISO-K/DN100CFRefurbished, Used On request
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B756-40-819 ISO100 Trapped O-Ring with Integrated Fine Inlet Screen, DN100 ISO-KRefurbished, Used On request
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B756-40-820 ISO100 Trapped O-Ring with Integrated Coarse Inlet Screen, DN100 ISO-KRefurbished, Used On request
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B756-41-991 EXT200/200H GCMS Compound Turbomolecular Pump (Reversed Body), 24 VRefurbished, Used On request
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B75800010 STP-L301C turbomolecular pump, ISO100 inletRefurbished, Used On request
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B75800090 STP-L301 turbomolecular pump, ISO100 inletRefurbished, Used On request
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B760-21-806 ISX inlet screen 2.5 mm hexagonal for EXT406PX, DN160 ISO-K/DN160CFRefurbished, Used On request
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B760-53-812 ISDX inlet screen 2.5 mm hexagonal for EXTPX split flow chamberRefurbished, Used On request
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B760-61-812 ISDX inlet screen 2.5 mm hexagonal for EXTPX split flow chamberRefurbished, Used On request
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B777-00-058 ISHX inlet screen 2.5 mm hexagonal for EXT555H, DN160 ISO-K/DN160CFRefurbished, Used On request
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B777-00-059 ISHX inlet screen 1 mm hexagonal for EXT555H, DN160 ISO-K/DN160CFRefurbished, Used On request
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B77751000 EXT556H Turbomolecular Pump DN160ISO-KRefurbished, Used On request
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B77752000 EXT556H Turbomolecular Pump DN160CFRefurbished, Used On request
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B77757000 EXT556H Turbomolecular Pump DN160ISO-K (Martensitic envelope)Refurbished, Used On request
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B77758000 EXT556H Turbomolecular Pump DN160CF (Martensitic envelope)Refurbished, Used On request
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B77761000 EXT556H Turbomolecular Pump DN160ISO-K (Fine inlet screen)Refurbished, Used On request
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B80000805 Bearing tool kitRefurbished, Used On request