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Edwards spare parts

Spare parts for Edwards rotary vane, scroll and turbomolecular vacuum pumps. Search by part number or browse by instrument series, then request a quote with the condition you need.

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Edwards instrument series

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Edwards parts

4,314 parts

  • D04850805 AIGX Spare Fuses, Pack of 5 Edwards · Seals and consumables
    Refurbished, Used On request
  • D04851000 AIGX-S-DN16CF Active Ion Gauge Edwards · Vacuum gauges
    Refurbished, Used On request
  • D04851801 AIGX Tube Spare DN16CF Edwards · Vacuum gauges
    Refurbished, Used On request
  • D04852000 AIGX-S-DN40CF Active Ion Gauge Edwards · Vacuum gauges
    Refurbished, Used On request
  • D04852801 AIGX Tube DN40CF Edwards · Vacuum gauges
    Refurbished, Used On request
  • D04860000 AIGX-D-NW25 ion gauge Edwards · Vacuum gauges
    Refurbished, Used On request
  • D04860800 AIGX-D Electronics Module, Spare Edwards · Vacuum gauges
    Refurbished, Used On request
  • D04861000 AIGX-D-DN16CF ion gauge Edwards · Vacuum gauges
    Refurbished, Used On request
  • D04862000 AIGX-D-DN40CF Active Ion Gauge Edwards · Vacuum gauges
    Refurbished, Used On request
  • D05001013 PRA ion source Edwards · Ion sources and interfaces
    Refurbished, Used On request
  • D05001015 PRA100S/200S analyzer tube Edwards · Mass spectrometer components
    Refurbished, Used On request
  • D05001016 PRA100/200 analyzer tube Edwards · Mass spectrometer components
    Refurbished, Used On request
  • D05001101 PRA100 Residual Gas Analyser Edwards · Mass spectrometer components
    Refurbished, Used On request
  • D05001102 PRA100S Residual Gas Analyser Edwards · Mass spectrometer components
    Refurbished, Used On request
  • D05001201 PRA200 Residual Gas Analyser Edwards · Mass spectrometer components
    Refurbished, Used On request
  • D05001202 PRA200S Residual Gas Analyser Edwards · Mass spectrometer components
    Refurbished, Used On request
  • D05002012 PRA-S/WRA-S SEM Edwards · Mass spectrometer components
    Refurbished, Used On request
  • D05002013 WRA200S/300S Ion Source Edwards · Ion sources and interfaces
    Refurbished, Used On request
  • D05002014 WRA200S/300S Filament Kit Edwards · Emitters and filaments
    Refurbished, Used On request
  • D05002015 WRA-S Analyzer Tube Edwards · Mass spectrometer components
    Refurbished, Used On request
  • D05002202 WRA200S Residual Gas Analyser Edwards · Mass spectrometer components
    Refurbished, Used On request
  • D05002302 WRA300S Residual Gas Analyser Edwards · Mass spectrometer components
    Refurbished, Used On request
  • D05914000 IS16K Vacuum Interlock Switch Edwards · Other parts
    Refurbished, Used On request
  • D05915000 VS16K Adjustable Vacuum Switch Edwards · Other parts
    Refurbished, Used On request
  • D13510903 ELD500 WET, 200-240V, 50/60Hz Edwards · Leak detectors
    Refurbished, Used On request
  • D13510904 ELD500 WET, 100-120V, 50/60Hz Edwards · Leak detectors
    Refurbished, Used On request
  • D13510906 ELD500 WET, 100-120V, 60Hz Edwards · Leak detectors
    Refurbished, Used On request
  • D13520903 ELD500 DRY, 200-240V, 50/60Hz Edwards · Leak detectors
    Refurbished, Used On request
  • D13520904 ELD500 DRY Leak Detector, 100-120V, 50/60Hz Edwards · Leak detectors
    Refurbished, Used On request
  • D13520906 ELD500 DRY Leak Detector, 100-120V, 60Hz Edwards · Leak detectors
    Refurbished, Used On request
  • D13530000 ELD500 FLEX Leak Detector, 100-240V, 50/60Hz Edwards · Leak detectors
    Refurbished, Used On request
  • D13544000 ELD4000 leak detector, 200-240V, 50/60Hz (stand-alone) Edwards · Leak detectors
    Refurbished, Used On request
  • D13544001 ELD4000 leak detector, 100-120V, 60Hz (stand-alone) Edwards · Leak detectors
    Refurbished, Used On request
  • D13550100 ELD500 RC Wired Remote Control Edwards · Leak detectors
    Refurbished, Used On request
  • D13550110 ELD500 RC Wireless Remote Control Edwards · Leak detectors
    Refurbished, Used On request
  • D13550130 ELD500 RC Wireless Extra Transmitter Edwards · Leak detectors
    Refurbished, Used On request
  • D13550200 ELD500 SL Extended SL Interface Edwards · Leak detectors
    Refurbished, Used On request
  • D13550300 ELD500 SL Standard Sniffer Line 4m Edwards · Leak detectors
    Refurbished, Used On request
  • D13550400 ELD500 Partial flow adaptor Edwards · Other parts
    Refurbished, Used On request
  • D13550403 Partial Flow System ELD, 200-240V Edwards · Leak detectors
    Refurbished, Used On request
  • D13550406 Partial Flow System ELD, 100-120V Edwards · Leak detectors
    Refurbished, Used On request
  • D13550500 ELD500 Transport Case Edwards · Other parts
    Refurbished, Used On request
  • D13550600 ELD500 Cart without Ebox Edwards · Leak detectors
    Refurbished, Used On request
  • D13550910 CL-Internal calibrated leak Edwards · Leak detectors
    Refurbished, Used On request
  • D13550930 CL-Cal Leak bspk. 0.5 - 1E-7, Screw Skt Edwards · Leak detectors
    Refurbished, Used On request
  • D13550950 CL-Calibrated Leak HE 4 to 6 Edwards · Leak detectors
    Refurbished, Used On request
  • D13570903 ELD30 leak detector, 200-230V Edwards · Leak detectors
    Refurbished, Used On request
  • D13570904 ELD30 leak detector, 100-120V Edwards · Leak detectors
    Refurbished, Used On request