Edwards spare parts
Spare parts for Edwards rotary vane, scroll and turbomolecular vacuum pumps. Search by part number or browse by instrument series, then request a quote with the condition you need.
Guides
Edwards instrument series
- Edwards RV205 parts
- Edwards E2M683 parts
- Edwards XDS77 parts
- Edwards nXDS40 parts
- Edwards EcoDry
- Edwards EXT and nEXT204 parts
- Edwards TIC42 parts
- Edwards Active Gauges175 parts
- Edwards iH, iL, iQDP and iXM Dry Pumps429 parts
- Edwards EH Mechanical Boosters377 parts
- Edwards T-Station Pumping Stations6 parts
- Edwards Valves312 parts
- Edwards Diffusion Pumps170 parts
- Edwards EPX and EPS91 parts
- Edwards GXS34 parts
- Edwards iXL and iXH48 parts
- Edwards STP50 parts
Edwards parts by category
- Boards and electronics 23
- Cryopumps 2
- Dry vacuum pumps 440
- Emitters and filaments 2
- Ion sources and interfaces 4
- Leak detectors 36
- Mass spectrometer components 12
- Other parts 1100
- Power supplies 2
- Rotary vane pumps 311
- Seals and consumables 772
- Tubing and fittings 656
- Turbomolecular pumps 126
- Vacuum controllers 92
- Vacuum gauges 177
- Vacuum pumps 273
- Valves 286
Edwards parts
4,314 parts
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A26407008 Thrust ringRefurbished, Used On request
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A26407009 Thrust ringRefurbished, Used On request
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A26407010 Thrust ringRefurbished, Used On request
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A26407011 Thrust ring, steelRefurbished, Used On request
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A26440001 Locking elements 'Ringfeder', steel, pairRefurbished, Used On request
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A26440002 Locking element 'Ringfeder' (steel)Refurbished, Used On request
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A26440003 Locking element 'Ringfeder'Refurbished, Used On request
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A26501004 Valve RubberRefurbished, Used On request
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A26501005 Clamp PadRefurbished, Used On request
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A26501012 Sight glass sealRefurbished, Used On request
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A265-01-017 Button (two-stage pumps only)Refurbished, Used On request
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A26501024 Foot for E2M1/E2M1.5 pumpRefurbished, Used On request
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A265-01-029 Valve padRefurbished, Used On request
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A26501031 Isolator rubberRefurbished, Used On request
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A26501032 Coupling elementRefurbished, Used On request
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A265-01-035 Distributor valve for E2M0.7/E2M1/E2M1.5Refurbished, Used On request
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A26501036 Valve Pad for E2M1.5 and E2M18 PumpRefurbished, Used On request
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A26501039 Valve Pad, VitonRefurbished, Used On request
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A26501040 U Seal, VitonRefurbished, Used On request
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A265-01-041 Rubber footRefurbished, Used On request
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A26501045 Valve Pad, NitrileRefurbished, Used On request
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A26501046 Valve Pad, NitrileRefurbished, Used On request
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A26501047 U Seal RV, NitrileRefurbished, Used On request
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A26501054 Silicone plugRefurbished, Used On request
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A26501066 Exhaust valve padRefurbished, Used On request
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A271-02-010 Gas ballast spring 50 x 7Refurbished, Used On request
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A27102013 SpringRefurbished, Used On request
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A271-02-016 Spring 17.0 x 8.5Refurbished, Used On request
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A27102020 Compression SpringRefurbished, Used On request
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A271-02-021 Gas ballast valve spring 15.5 x 8.0Refurbished, Used On request
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A27102022 SpringRefurbished, Used On request
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A27102023 SpringRefurbished, Used On request
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A27102024 SpringRefurbished, Used On request
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A271-02-029 Valve spring H.V., 15.9 x 11.9 mmRefurbished, Used On request
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A271-02-032 Distributor spring 14.0 x 10.3 mmRefurbished, Used On request
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A271-02-033 Valve spring H.V. 30 x 9 mmRefurbished, Used On request
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A271-02-034 Shaft spring 19.0 x 6.2Refurbished, Used On request
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A271-02-036 Oil supply springs 28.0 x 13.3Refurbished, Used On request
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A27102048 Compression springRefurbished, Used On request
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A27102085 Suction valve spring ES65/ES100Refurbished, Used On request
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A27102086 Suction valve spring ES200/ES300Refurbished, Used On request
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A27102087 Suction valve spring ES630Refurbished, Used On request
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A27103010 Bowex Coupling Ring ES65/ES100Refurbished, Used On request
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A27103011 Bowex Plastic Ring ES630Refurbished, Used On request
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A27103012 Bowex Coupling Ring ES200/ES300Refurbished, Used On request
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A271-15-414 Distributor rubber, larger central holeRefurbished, Used On request
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A271-15-440 Distributor rubber, smaller central holeRefurbished, Used On request
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A27159414 Distributor rubber (pre-Aug. 1991 pumps)Refurbished, Used On request