Edwards spare parts
Spare parts for Edwards rotary vane, scroll and turbomolecular vacuum pumps. Search by part number or browse by instrument series, then request a quote with the condition you need.
Guides
Edwards instrument series
- Edwards RV205 parts
- Edwards E2M683 parts
- Edwards XDS77 parts
- Edwards nXDS40 parts
- Edwards EcoDry
- Edwards EXT and nEXT204 parts
- Edwards TIC42 parts
- Edwards Active Gauges175 parts
- Edwards iH, iL, iQDP and iXM Dry Pumps429 parts
- Edwards EH Mechanical Boosters377 parts
- Edwards T-Station Pumping Stations6 parts
- Edwards Valves312 parts
- Edwards Diffusion Pumps170 parts
- Edwards EPX and EPS91 parts
- Edwards GXS34 parts
- Edwards iXL and iXH48 parts
- Edwards STP50 parts
Edwards parts by category
- Boards and electronics 23
- Cryopumps 2
- Dry vacuum pumps 440
- Emitters and filaments 2
- Ion sources and interfaces 4
- Leak detectors 36
- Mass spectrometer components 12
- Other parts 1100
- Power supplies 2
- Rotary vane pumps 311
- Seals and consumables 772
- Tubing and fittings 656
- Turbomolecular pumps 126
- Vacuum controllers 92
- Vacuum gauges 177
- Vacuum pumps 273
- Valves 286
Edwards parts
4,314 parts
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A27159415 Rubber sealRefurbished, Used On request
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A27159416 Diaphragm EDM15Refurbished, Used On request
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A271-59-418 Valve rubber H.V. (E2M2 only)Refurbished, Used On request
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A27159428 GasketRefurbished, Used On request
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A27159429 Gas ballast gasket assembly E1M175/275Refurbished, Used On request
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A271-59-430 Distributor rubberRefurbished, Used On request
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A27159439 Rubber seal ring EH1200Refurbished, Used On request
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A27159440 Distributor rubber (post Aug. 1991 pumps)Refurbished, Used On request
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A27159441 Ring (Viton)Refurbished, Used On request
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A27159504 LV exhaust valve rubberRefurbished, Used On request
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A27159505 HV exhaust valve rubberRefurbished, Used On request
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A27159506 Exhaust valve rubberRefurbished, Used On request
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A27159509 Exhaust valve rubber (E2M80)Refurbished, Used On request
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A27159514 Exhaust valve rubberRefurbished, Used On request
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A27159515 Low Vac. exhaust valve rubberRefurbished, Used On request
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A27159516 Exhaust valve rubberRefurbished, Used On request
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A27159517 Exhaust valve rubberRefurbished, Used On request
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A27159532 GasketRefurbished, Used On request
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A271-59-534 D-seal for EMF20 Oil Mist FilterRefurbished, Used On request
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A271-59-536 D-seal for EMF3 Oil Mist FilterRefurbished, Used On request
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A27159538 EMF3 mist filter body sealRefurbished, Used On request
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A27159541 Low Vac. exhaust valve rubber (E2M80)Refurbished, Used On request
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A27159548 Gasket EH1200 VitonRefurbished, Used On request
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A27159549 Gasket, VitonRefurbished, Used On request
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A271-59-601 Sight glass gasket for ITx100 and 300Refurbished, Used On request
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A271-59-602 Sight glass gasket for ITx800Refurbished, Used On request
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A271-59-603 Sight glass gasket for ITx20KRefurbished, Used On request
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A27159606 Gasket SPEEDIVAC2Refurbished, Used On request
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A27159614 Ballast gasketRefurbished, Used On request
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A27159615 Ballast gasketRefurbished, Used On request
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A27159618 Oil box gasketRefurbished, Used On request
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A27159629 Oil box gasketRefurbished, Used On request
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A27159633 Ballast gasketRefurbished, Used On request
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A27159635 Oil box gasketRefurbished, Used On request
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A271-59-637 GasketRefurbished, Used On request
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A27159638 Sight glass gasketRefurbished, Used On request
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A27160001 Motor gasket QDP 40Refurbished, Used On request
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A27160002 Motor gasket QDP 80Refurbished, Used On request
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A27160004 Printed gasket QMB1200Refurbished, Used On request
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A271-60-005 Printed gasket (oil box)Refurbished, Used On request
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A271-60-006 Printed gasket (cartridge)Refurbished, Used On request
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A271-60-008 Printed gasket (seal carrier)Refurbished, Used On request
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A27165001 Shim 0.05 mm thickRefurbished, Used On request
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A27165002 Shim 0.10 mm thickRefurbished, Used On request
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A27165003 Shim 0.25 mm thickRefurbished, Used On request
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A27165022 Shim, 0.03 mm thickRefurbished, Used On request
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A27165024 Shim, 0.10 mm thickRefurbished, Used On request
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A27165025 Shim, 0.20 mm thickRefurbished, Used On request