Edwards spare parts
Spare parts for Edwards rotary vane, scroll and turbomolecular vacuum pumps. Search by part number or browse by instrument series, then request a quote with the condition you need.
Guides
Edwards instrument series
- Edwards RV205 parts
- Edwards E2M683 parts
- Edwards XDS77 parts
- Edwards nXDS40 parts
- Edwards EcoDry
- Edwards EXT and nEXT204 parts
- Edwards TIC42 parts
- Edwards Active Gauges175 parts
- Edwards iH, iL, iQDP and iXM Dry Pumps429 parts
- Edwards EH Mechanical Boosters377 parts
- Edwards T-Station Pumping Stations6 parts
- Edwards Valves312 parts
- Edwards Diffusion Pumps170 parts
- Edwards EPX and EPS91 parts
- Edwards GXS34 parts
- Edwards iXL and iXH48 parts
- Edwards STP50 parts
Edwards parts by category
- Boards and electronics 23
- Cryopumps 2
- Dry vacuum pumps 440
- Emitters and filaments 2
- Ion sources and interfaces 4
- Leak detectors 36
- Mass spectrometer components 12
- Other parts 1100
- Power supplies 2
- Rotary vane pumps 311
- Seals and consumables 772
- Tubing and fittings 656
- Turbomolecular pumps 126
- Vacuum controllers 92
- Vacuum gauges 177
- Vacuum pumps 273
- Valves 286
Edwards parts
4,314 parts
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A528-57-000 iQDP Shaft-Seals Purge ModuleRefurbished, Used On request
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A528-58-000 IQDP Gas-Ballast ModuleRefurbished, Used On request
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A528-65-000 IQMB Booster Frame Connection Kit for QDP40/QMB250FRefurbished, Used On request
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A528-66-000 IQMB Booster Frame Connection Kit for QDP40/QMB500FRefurbished, Used On request
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A528-67-000 IQMB Booster Frame Connection Kit for QDP80/QMB250FRefurbished, Used On request
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A528-68-000 IQMB Booster Frame Connection Kit for QDP80/QMB500FRefurbished, Used On request
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A528-69-000 IQMB Booster Frame Connection Kit for QDP80/QMB1200FRefurbished, Used On request
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A528-70-000 QMB Booster Frame Acoustic Enclosure for QDP40/QMB250FRefurbished, Used On request
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A528-71-000 QMB Booster Frame Acoustic Enclosure for QDP40/QMB500FRefurbished, Used On request
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A528-72-000 QMB Booster Frame Acoustic Enclosure for QDP80/QMB250FRefurbished, Used On request
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A528-73-000 QMB Booster Frame Acoustic Enclosure for QDP80/QMB500FRefurbished, Used On request
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A528-74-000 QMB Booster Frame Acoustic Enclosure for QDP80/QMB1200FRefurbished, Used On request
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A528-79-905 QDP80 Drystar Pump (4 kW)Refurbished, Used On request
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A52880015 Gas ballast blank (stainless steel)Refurbished, Used On request
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A52880212 3 to 4 interstage adaptor QDP40Refurbished, Used On request
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A52880785 Manifold SupportRefurbished, Used On request
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A52880800 QDP and iQDP80 Motor Replacement KitRefurbished, Used On request
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A528-80-905 QDP80 Drystar Pump (8 kW)Refurbished, Used On request
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A52908143 Blanking Flange ISO 100Refurbished, Used On request
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A52908144 Blanking Flange ISO 160Refurbished, Used On request
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A52908145 Blanking Flange ISO 250Refurbished, Used On request
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A529-33-000 QMB250F to QMKII Connection KitRefurbished, Used On request
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A529-34-000 QMB500F to QMKII Connection KitRefurbished, Used On request
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A529-35-000 QMB1200F to QMKII Connection KitRefurbished, Used On request
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A53114000 Model 250 Water-Cooled Exhaust TrapRefurbished, Used On request
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A53114060 Exhaust Trap Connection and T.M.S. Kit for pump with 250/500 boosterRefurbished, Used On request
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A53114065 Exhaust Trap Connection and T.M.S. Kit for pump with 1200 boosterRefurbished, Used On request
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A53115020 Replacement trap liners for Model 250 Water-Cooled Exhaust TrapRefurbished, Used On request
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A532-01-000 IQDP Acoustic Enclosure for iQ40Refurbished, Used On request
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A532-03-000 IQDP Acoustic Enclosure for iQ80Refurbished, Used On request
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A532-07-000 iQ Exhaust Temperature SensorRefurbished, Used On request
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A532-08-403 Cable TIM to Gate ValveRefurbished, Used On request
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A532-12-033 iQMB1200F Motor Ancillaries KitRefurbished, Used On request
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A532-20-050 Terminator PlugRefurbished, Used On request
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A532-25-033 iQMB250/500F Motor Ancillaries KitRefurbished, Used On request
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A532-30-000 IQMB Booster Connection Kit for iQDP40/iQMB250F (HEM)Refurbished, Used On request
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A532-31-000 IQMB Booster Connection Kit for iQDP40/iQMB250F (VEM)Refurbished, Used On request
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A532-32-000 IQMB Booster Connection Kit for iQDP40/iQMB500F (HEM)Refurbished, Used On request
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A532-33-000 IQMB Booster Connection Kit for iQDP80/iQMB250F (HEM)Refurbished, Used On request
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A532-34-000 IQMB Booster Connection Kit for iQDP80/iQMB500F (HEM)Refurbished, Used On request
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A532-40-905 iQDP40 Dry PumpRefurbished, Used On request
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A532-49-000 IQ Water Flow-SwitchRefurbished, Used On request
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A532-54-000 iH Nitrogen Flow SwitchRefurbished, Used On request
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A532-59-000 IQDP Gas System Module Series 2Refurbished, Used On request
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A532-69-000 IQMB In-Line Booster Frame Connection Kit for QDP80/QMB1200FRefurbished, Used On request
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A532-70-000 IQMB Booster Frame Acoustic Enclosure for iQDP40/iQMB250FRefurbished, Used On request
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A532-71-000 IQMB Booster Frame Acoustic Enclosure for iQDP40/iQMB500FRefurbished, Used On request
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A532-72-000 IQMB Booster Frame Acoustic Enclosure for iQDP80/iQMB250FRefurbished, Used On request