Edwards spare parts
Spare parts for Edwards rotary vane, scroll and turbomolecular vacuum pumps. Search by part number or browse by instrument series, then request a quote with the condition you need.
Guides
Edwards instrument series
- Edwards RV205 parts
- Edwards E2M683 parts
- Edwards XDS77 parts
- Edwards nXDS40 parts
- Edwards EcoDry
- Edwards EXT and nEXT204 parts
- Edwards TIC42 parts
- Edwards Active Gauges175 parts
- Edwards iH, iL, iQDP and iXM Dry Pumps429 parts
- Edwards EH Mechanical Boosters377 parts
- Edwards T-Station Pumping Stations6 parts
- Edwards Valves312 parts
- Edwards Diffusion Pumps170 parts
- Edwards EPX and EPS91 parts
- Edwards GXS34 parts
- Edwards iXL and iXH48 parts
- Edwards STP50 parts
Edwards parts by category
- Boards and electronics 23
- Cryopumps 2
- Dry vacuum pumps 440
- Emitters and filaments 2
- Ion sources and interfaces 4
- Leak detectors 36
- Mass spectrometer components 12
- Other parts 1100
- Power supplies 2
- Rotary vane pumps 311
- Seals and consumables 772
- Tubing and fittings 656
- Turbomolecular pumps 126
- Vacuum controllers 92
- Vacuum gauges 177
- Vacuum pumps 273
- Valves 286
Edwards parts
4,314 parts
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A532-73-000 IQMB Booster Frame Acoustic Enclosure for iQDP80/iQMB500FRefurbished, Used On request
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A532-74-000 IQMB Booster Frame Acoustic Enclosure for iQDP80/iQMB1200FRefurbished, Used On request
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A532-80-905 iQDP80 Dry PumpRefurbished, Used On request
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A533-24-015 Heated exhaust purge kit (HTX variants)Refurbished, Used On request
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A533-50-908 IH80 Dry Pumping System, 460V, 60Hz, 3-phaseRefurbished, Used On request
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A533-50-945 IH80 Dry Pumping System, 200/208V, 50/60Hz, 3-phaseRefurbished, Used On request
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A533-50-946 IH80 Dry Pumping System, 380/415V, 50Hz, 3-phaseRefurbished, Used On request
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A533-50-957 IH80 Dry Pumping System, 230V, 60Hz, 3-phaseRefurbished, Used On request
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A533-51-946 IH600 Dry Pumping System, 380/415V, 50Hz, 3-phaseRefurbished, Used On request
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A533-51-957 IH600 Dry Pumping System, 230V, 60Hz, 3-phaseRefurbished, Used On request
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A533-52-945 IH1000 Dry Pumping System, 200/208V, 3-phaseRefurbished, Used On request
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A533-52-946 IH1000 Dry Pumping System, 380/415V, 50Hz, 3-phaseRefurbished, Used On request
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A533-52-957 IH1000 Dry Pumping System, 230V, 60Hz, 3-phaseRefurbished, Used On request
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A533-57-908 IH80F Dry Pumping System, 460V, 60Hz, 3-phaseRefurbished, Used On request
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A533-57-945 IH80F Dry Pumping System, 200/208V, 50/60Hz, 3-phaseRefurbished, Used On request
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A533-57-946 IH80F Dry Pumping System, 380/415V, 50Hz, 3-phaseRefurbished, Used On request
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A533-57-957 IH80F Dry Pumping System, 230 V, 60 Hz, 3-phaseRefurbished, Used On request
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A533-58-908 IH600F Dry Pumping System, 460V, 60Hz, 3-phaseRefurbished, Used On request
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A533-58-945 IH600F Dry Pumping System, 200/208V, 50/60Hz, 3-phaseRefurbished, Used On request
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A533-58-946 IH600F Dry Pumping System, 380/415V, 50Hz, 3-phaseRefurbished, Used On request
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A533-58-957 IH600F Dry Pumping System, 230V, 60Hz, 3-phaseRefurbished, Used On request
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A533-59-908 IH1000F Dry Pumping System, 460V, 60Hz, 3-phaseRefurbished, Used On request
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A533-59-945 IH1000F Dry Pumping System, 200/208 V, 50/60 Hz, 3-phaseRefurbished, Used On request
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A533-59-946 IH1000F Dry Pumping System, 380/415V, 50Hz, 3-phaseRefurbished, Used On request
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A533-59-957 IH1000F Dry Pumping System, 230 V, 60 Hz, 3-phaseRefurbished, Used On request
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A53608131 NW25 Elbow and Check Valve Kit Process with EnclosureRefurbished, Used On request
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A53608132 NW25 Elbow and Check Valve Kit Loadock with EnclosureRefurbished, Used On request
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A53608133 1/4" BSP QC Kit AssemblyRefurbished, Used On request
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A54000002 Pump connection kit for E1M/E2M40Refurbished, Used On request
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A54000004 Pump connection kit for E1M/E2M80Refurbished, Used On request
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A54011999 CR base module, PFPE preparedRefurbished, Used On request
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A54012022 25CR EOF canisterRefurbished, Used On request
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A54050722 Lifting / seismic / stacking brackets (pair), iXL120Refurbished, Used On request
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A54100023 Upgrade kit IPX100/100A/CNET to iXL120Refurbished, Used On request
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A54100024 Upgrade kit IPX180/CNET to iXL120Refurbished, Used On request
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A54113010 IXL120 Dry Pump E 200-460V, 3/8 QC Water FittingsRefurbished, Used On request
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A54113011 IXL120 Dry Pump E 200-460V, 3/8 QC Water Fittings, Flow Control ValveRefurbished, Used On request
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A54113020 IXL120 Dry Pump E 200-460V, 1/4 QC Water FittingsRefurbished, Used On request
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A54113221 IXL120 Dry Pump E 200-460V SPI, 1/4 QC Water Fittings, Flow Control ValveRefurbished, Used On request
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A54113610 IXL120 Dry Pump E 200-460V HIT, 3/8 QC Water FittingsRefurbished, Used On request
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A54113611 IXL120 Dry Pump E 200-460V HIT, 3/8 QC Water Fittings, Flow Control ValveRefurbished, Used On request
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A54113710 IXL120 Dry Pump E 200-460V MCM, 3/8 QC Water FittingsRefurbished, Used On request
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A54113711 IXL120 Dry Pump E 200-460V MCM, 3/8 QC Water Fittings, Flow Control ValveRefurbished, Used On request
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A54114010 IXL120N Dry Pump E 200-460V, 3/8 QC Water FittingsRefurbished, Used On request
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A54114011 IXL120N Dry Pump E 200-460V, 3/8 QC Water Fittings, Flow Control ValveRefurbished, Used On request
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A54114020 IXL120N Dry Pump E 200-460V, 1/4 QC Water FittingsRefurbished, Used On request
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A54114210 IXL120N Dry Pump E 200-460V SPI TIM, 3/8 QC Water FittingsRefurbished, Used On request
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A54114410 IXL120N Dry Pump E 200-460V TEL, 3/8 QC Water FittingsRefurbished, Used On request