Edwards spare parts

Spare parts for Edwards rotary vane, scroll and turbomolecular vacuum pumps. Search by part number or browse by instrument series, then request a quote with the condition you need.

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Edwards instrument series

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Edwards parts

4,314 parts

  • A54114411 IXL120N Dry Pump E 200-460V TEL, 3/8 QC Water Fittings, Flow Control Valve Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A541-33-010 IXL600 dry pump 200-460 V 50/60 Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A541-34-010 IXL600N dry pump 200-460 V 50/60 Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A541-53-020 IXL1000 dry pump 200-460 V 50/60 Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A541-54-020 IXL1000N dry pump 200-460 V 50/60 Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54610958 IGX100L Dry Pump, 200-230V 50/60Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54610959 IGX100L Dry Pump, 380-460V 50/60Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54611958 IGX100N Dry Pump, 200-230V 50/60Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54611959 IGX100N Dry Pump, 380-460V 50/60Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54612958 IGX100M Dry Pump, 200-230V 50/60Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54612959 IGX100M Dry Pump, 380-460V 50/60Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54630958 IGX600L Dry Pump, 200-230V 50/60Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54630959 IGX600L Dry Pump, 380-460V 50/60Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54631958 IGX600N Dry Pump, 200-230V 50/60Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54631959 IGX600N Dry Pump, 380-460V 50/60Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54632958 IGX600M Dry Pump, 200-230V 50/60Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54632959 IGX600M Dry Pump, 380-460V 50/60Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54648958 IGX100MTI Dry Pump, 200-230V 50/60Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54681958 IGX1000N Dry Pump, 200-230V 50/60Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54681959 IGX1000N Dry Pump, 380-460V 50/60Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54710958 GX100L Dry Pump 200-230 V 50/60 Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54710959 GX100L Dry Pump 380-460 V 50/60 Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54711958 GX100N Dry Pump 200-230 V 50/60 Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54711959 GX100N Dry Pump 380-450 V 50/60 Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54730958 GX600L Dry Pump 200-230 V 50/60 Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54730959 GX600L Dry Pump 380-460 V 50/60 Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54731958 GX600N Dry Pump 200-230 V 50/60 Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54731959 GX600N Dry Pump 380-450 V 50/60 Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54746958 GX100TI Dry Pump 200-230 V 50/60 Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54781958 GX1000N Dry Pump 200-230 V 50/60 Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A54781959 GX1000N Dry Pump 380-460 V 50/60 Hz Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A550-01-068 T.M.S. Controller Unit 220/240V Edwards · Other parts
    Refurbished, Used On request
  • A550-01-069 T.M.S. Controller Unit 110V Edwards · Other parts
    Refurbished, Used On request
  • A56106958 IXM200 dry pump, 200-230 V Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A56106959 IXM200 dry pump, 380-460 V Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A56116958 IXM200 Xcede Standard dry pump system Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A56116959 IXM200 Xcede Standard dry pump system Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A56126958 IXM600 Standard dry pump, 200-230 V Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A56126959 IXM600 Standard dry pump, 380-460 V Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A56136958 IXM600 Xcede Standard dry pump, 200-230 V Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A56136959 IXM600 Xcede Standard dry pump system Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A56146958 IXM1200 Standard dry pump, 200-230 V Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A56146959 IXM1200 Standard dry pump, 380-460 V Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A56156958 IXM1200 Xcede Standard dry pump, 200-230 V Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A56156959 IXM1200 Xcede Standard dry pump, 380-460 V Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A56186958 IXM3000 Standard dry pump system Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A56186959 IXM3000 Standard dry pump system Edwards · Dry vacuum pumps
    Refurbished, Used On request
  • A56346958 IXM1200 Customer special A dry pump, 200-230 V Edwards · Dry vacuum pumps
    Refurbished, Used On request