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Edwards spare parts

Spare parts for Edwards rotary vane, scroll and turbomolecular vacuum pumps. Search by part number or browse by instrument series, then request a quote with the condition you need.

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Edwards instrument series

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Edwards parts

4,314 parts

  • B53640100 E2CH100/6 cold head Edwards · Cryopumps
    Refurbished, Used On request
  • B53670100 E1CH220 cold head Edwards · Cryopumps
    Refurbished, Used On request
  • B53750300 ECC5000 LV - 1 CP helium compressor Edwards · Other parts
    Refurbished, Used On request
  • B53750400 ECC5000 - 1 CP helium compressor Edwards · Other parts
    Refurbished, Used On request
  • B54046000 STP451 Vibration isolator Edwards · Other parts
    Refurbished, Used On request
  • B580-20-000 Vibration isolator, DN100ISO-K inlet flange Edwards · Other parts
    Refurbished, Used On request
  • B58049000 Air Cooling Unit ISO160 Edwards · Turbomolecular pumps
    Refurbished, Used On request
  • B580-51-001 ISX100 inlet screen, DN100 ISO-K / DN100CF Edwards · Seals and consumables
    Refurbished, Used On request
  • B580-51-002 ISX inlet screen 1 mm hexagonal for EXT301/501, DN160 ISO-K/DN160CF Edwards · Other parts
    Refurbished, Used On request
  • B580-51-005 ISX inlet screen 1 mm hexagonal for EXT70/70H, DN63 ISO-K/DN63CF Edwards · Other parts
    Refurbished, Used On request
  • B58051007 VRX Vent-Restrictor, 160 coarse, for EXT556H Edwards · Seals and consumables
    Refurbished, Used On request
  • B580-51-008 Inlet screen (fine), DN160ISO-K/DN160CF Edwards · Seals and consumables
    Refurbished, Used On request
  • B58052040 BX70 Heater Band 110V 30W Edwards · Turbomolecular pumps
    Refurbished, Used On request
  • B580-52-041 BX250 bakeout band, 110 V Edwards · Other parts
    Refurbished, Used On request
  • B580-52-042 BX351 Bakeout Band, 110 V Edwards · Other parts
    Refurbished, Used On request
  • B580-52-043 BX450/110 V Bakeout Band for EXT406PX Edwards · Other parts
    Refurbished, Used On request
  • B580-52-044 BX501/110 V Bakeout Band for EXT555H/555HF/555Hi/555HE/EXT556 Edwards · Other parts
    Refurbished, Used On request
  • B580-52-048 BX300 Bakeout Band, 110 V, for nEXT300 Edwards · Other parts
    Refurbished, Used On request
  • B58052060 BX70 Heater Band 240V 30W Edwards · Turbomolecular pumps
    Refurbished, Used On request
  • B580-52-061 BX250 bakeout band, 240 V Edwards · Other parts
    Refurbished, Used On request
  • B580-52-062 BX351 Bakeout Band, 240 V Edwards · Other parts
    Refurbished, Used On request
  • B580-52-063 BX450/240 V bakeout band for EXT406PX Edwards · Other parts
    Refurbished, Used On request
  • B580-52-064 BX501/240 V bakeout band for EXT555H/555HF/555Hi/555HE/EXT556 Edwards · Other parts
    Refurbished, Used On request
  • B580-52-068 BX300 Bakeout Band, 240 V, for nEXT300 Edwards · Other parts
    Refurbished, Used On request
  • B58052773 CF100 flange heater 100-120 V Edwards · Other parts
    Refurbished, Used On request
  • B58052774 CF100 flange heater 200-240 V Edwards · Other parts
    Refurbished, Used On request
  • B58052775 nEXT730 Flange Heater 110 V Edwards · Turbomolecular pumps
    Refurbished, Used On request
  • B58052776 nEXT730 Flange Heater 240 V Edwards · Turbomolecular pumps
    Refurbished, Used On request
  • B580-53-050 ACX70 Air Cooler Edwards · Other parts
    Refurbished, Used On request
  • B58053075 ACX75 Air Cooler for EXT70/70H/70Hi/75DX/75iDX Pumps Edwards · Other parts
    Refurbished, Used On request
  • B580-53-150 ACX250 Air Cooler Edwards · Other parts
    Refurbished, Used On request
  • B580-53-160 ACX250H air-cooler Edwards · Other parts
    Refurbished, Used On request
  • B580-53-170 ACX nEXT Radial Fan Air Cooler with Phoenix Connector Edwards · Turbomolecular pumps
    Refurbished, Used On request
  • B58053175 ACX nEXT radial fan air cooler Edwards · Other parts
    Refurbished, Used On request
  • B580-53-180 ACX nEXT Axial Fan Air Cooler with Phoenix Connector Edwards · Turbomolecular pumps
    Refurbished, Used On request
  • B58053185 ACX nEXT axial fan air cooler Edwards · Other parts
    Refurbished, Used On request
  • B580-53-200 ACX500 air cooler for EXT351/501 Edwards · Other parts
    Refurbished, Used On request
  • B580-53-405 ACX400 axial air cooler for EXT406PX/EXT400/200/(30i)PX Edwards · Other parts
    Refurbished, Used On request
  • B580-53-455 ACX400 radial air cooler for EXT406PX/EXT400/200/(30i)PX Edwards · Other parts
    Refurbished, Used On request
  • B580-53-561 ACX555 air cooler for EXT555H/555HF/555Hi Edwards · Other parts
    Refurbished, Used On request
  • B58061000 Vibration Isolator ISO200-K Edwards · Other parts
    Refurbished, Used On request
  • B580-61-001 WCX500 water cooler Edwards · Other parts
    Refurbished, Used On request
  • B580-66-010 TAV5 Vent Valve Edwards · Valves
    Refurbished, Used On request
  • B580-66-020 TAV6 Vent Valve Edwards · Valves
    Refurbished, Used On request
  • B58066040 N/C TAV5 vent valve, bare wired (nEXT85) Edwards · Valves
    Refurbished, Used On request
  • B580-67-003 WCX555 water cooler for EXT555H/555HF/555Hi Edwards · Other parts
    Refurbished, Used On request
  • B580-69-001 EXT70H/ISO63 interstage-port accessory kit Edwards · Other parts
    Refurbished, Used On request
  • B581-05-000 Vibration isolator DN100CF Edwards · Other parts
    Refurbished, Used On request