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Edwards spare parts

Spare parts for Edwards rotary vane, scroll and turbomolecular vacuum pumps. Search by part number or browse by instrument series, then request a quote with the condition you need.

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Edwards instrument series

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Edwards parts

4,314 parts

  • B581-10-000 Vibration isolator DN160CF Edwards · Other parts
    Refurbished, Used On request
  • B581-20-000 Vibration isolator DN100ISO-K Edwards · Other parts
    Refurbished, Used On request
  • B581-25-000 Vibration isolator DN160ISO-K Edwards · Other parts
    Refurbished, Used On request
  • B61001100 Energy Efficiency Controller (EEC), nHT series diffusion pump Edwards · Vacuum controllers
    Refurbished, Used On request
  • B61233100 Extended cold cap, nHT series diffusion pump Edwards · Other parts
    Refurbished, Used On request
  • B61234100 Inlet baffle, nHT series diffusion pump Edwards · Other parts
    Refurbished, Used On request
  • B61433100 Extended cold cap, nHT series diffusion pump Edwards · Other parts
    Refurbished, Used On request
  • B61434100 Inlet baffle, nHT series diffusion pump Edwards · Other parts
    Refurbished, Used On request
  • B61533100 Extended cold cap, nHT series diffusion pump Edwards · Other parts
    Refurbished, Used On request
  • B61534100 Inlet baffle, nHT series diffusion pump Edwards · Other parts
    Refurbished, Used On request
  • B61633100 Extended cold cap, nHT series diffusion pump Edwards · Other parts
    Refurbished, Used On request
  • B61634100 Inlet baffle, nHT series diffusion pump Edwards · Other parts
    Refurbished, Used On request
  • B62426952 63 mm Diffstak Combined Outfit, 220 V 1-ph 50/60 Hz Edwards · Vacuum pumps
    Refurbished, Used On request
  • B62426960 63 mm Diffstak Combined Outfit, 245 V 1-ph 50/60 Hz Edwards · Vacuum pumps
    Refurbished, Used On request
  • B62426990 63 mm Diffstak Combined Outfit, 115 V 1-ph 50/60 Hz Edwards · Vacuum pumps
    Refurbished, Used On request
  • B62613952 100 mm Diffstak Combined Outfit, 220 V 1-ph 50/60 Hz Edwards · Vacuum pumps
    Refurbished, Used On request
  • B62613960 100 mm Diffstak Combined Outfit, 245 V 1-ph 50/60 Hz Edwards · Vacuum pumps
    Refurbished, Used On request
  • B62613990 100 mm Diffstak Combined Outfit, 115 V 1-ph 50/60 Hz Edwards · Vacuum pumps
    Refurbished, Used On request
  • B650-01-050 Seals Kit for GVI040 GV Valve (NW40) Edwards · Seals and consumables
    Refurbished, Used On request
  • B650-01-070 Bellows Kit for GVI040 GV Valve (NW40) Edwards · Seals and consumables
    Refurbished, Used On request
  • B65051000 GVI040 Pneumatic ISO Valve, NW40 Edwards · Valves
    Refurbished, Used On request
  • B65053000 Pneumatic Valve GVC015, 2.37 inch od CF, 40/1½ Edwards · Valves
    Refurbished, Used On request
  • B65101020 Seal Kit for GVI050 ISO Valve NW50 Edwards · Seals and consumables
    Refurbished, Used On request
  • B651-01-050 Seals Kit for GVI050 GV Valve (NW50) Edwards · Seals and consumables
    Refurbished, Used On request
  • B651-01-070 Bellows Kit for GVI050 GV Valve (NW50) Edwards · Seals and consumables
    Refurbished, Used On request
  • B65151000 GVI050 Pneumatic ISO Valve, NW50 Edwards · Valves
    Refurbished, Used On request
  • B651-52-000 GVA020 ANSI GV Valve, Pneumatic, ANSI2 Flange Edwards · Valves
    Refurbished, Used On request
  • B65153000 Pneumatic Valve GVC020, 3.37 inch od CF, 50/2 Edwards · Valves
    Refurbished, Used On request
  • B65201020 Seal Kit for GVI063 ISO Valve ISO63 Edwards · Seals and consumables
    Refurbished, Used On request
  • B652-01-050 Seals Kit for GVI063 GV Valve (ISO63) Edwards · Seals and consumables
    Refurbished, Used On request
  • B652-01-070 Bellows Kit for GVI063 Valve (ISO63) Edwards · Seals and consumables
    Refurbished, Used On request
  • B65251000 GVI063 Pneumatic ISO Valve, ISO63 Edwards · Valves
    Refurbished, Used On request
  • B652-52-000 GVA025 ANSI GV Valve, Pneumatic, ANSI2 Flange Edwards · Valves
    Refurbished, Used On request
  • B65253000 Pneumatic Valve GVC025, 4.47 inch od CF, 63/2½ Edwards · Valves
    Refurbished, Used On request
  • B652-54-000 GVI063P pneumatic gate valve, ISO63 Edwards · Valves
    Refurbished, Used On request
  • B65301020 Seal Kit for GVI100 Valve, ISO100 Edwards · Seals and consumables
    Refurbished, Used On request
  • B65301030 Bellows Kit for GVI100, GVI160 and GVI200 Valves Edwards · Seals and consumables
    Refurbished, Used On request
  • B653-01-050 Seals Kit for GVI100 Valve (ISO100) Edwards · Seals and consumables
    Refurbished, Used On request
  • B653-01-070 Bellows Kit for GVI100 Valve (ISO100) Edwards · Seals and consumables
    Refurbished, Used On request
  • B65351000 GVI100 Pneumatic ISO Valve, ISO100 Edwards · Valves
    Refurbished, Used On request
  • B653-52-000 GVA040 ANSI GV Valve, Pneumatic, ANSI4 Flange Edwards · Valves
    Refurbished, Used On request
  • B65353000 Pneumatic Valve GVC040, 6.00 inch od CF, 100/4 Edwards · Valves
    Refurbished, Used On request
  • B653-54-000 GVI100P pneumatic gate valve, ISO100 Edwards · Valves
    Refurbished, Used On request
  • B65401020 Seal Kit for GVI160 Valve, ISO160 Edwards · Seals and consumables
    Refurbished, Used On request
  • B654-01-050 Seals Kit for GVI160 Valve (ISO160) Edwards · Seals and consumables
    Refurbished, Used On request
  • B654-01-070 Bellows Kit for GVI160 Valve (ISO160) Edwards · Seals and consumables
    Refurbished, Used On request
  • B65451000 GVI160 Pneumatic ISO Valve, ISO160 Edwards · Valves
    Refurbished, Used On request
  • B654-52-000 GVA060 ANSI GV Valve, Pneumatic, ANSI6 Flange Edwards · Valves
    Refurbished, Used On request