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Edwards spare parts

Spare parts for Edwards rotary vane, scroll and turbomolecular vacuum pumps. Search by part number or browse by instrument series, then request a quote with the condition you need.

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Edwards instrument series

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Edwards parts

4,314 parts

  • D372-35-000 IL Serial and Parallel Communications Module Edwards · Vacuum controllers
    Refurbished, Used On request
  • D372-36-000 IL Parallel Communications Module Edwards · Vacuum controllers
    Refurbished, Used On request
  • D372-37-000 iH Pump Display Module Edwards · Vacuum controllers
    Refurbished, Used On request
  • D372-41-000 Active Gauge Connection Kit Edwards · Vacuum gauges
    Refurbished, Used On request
  • D37241017 GXS Auxiliary Gauge Cable (0-10V) Edwards · Vacuum gauges
    Refurbished, Used On request
  • D37241019 GXS pressure input cable (4-20 mA) Edwards · Other parts
    Refurbished, Used On request
  • D37241023 GXS pressure input connector (4-20mA) Edwards · Other parts
    Refurbished, Used On request
  • D37272000 Pump Display Terminal (PDT) Edwards · Vacuum controllers
    Refurbished, Used On request
  • D372-72-800 iH Pump Display Terminal Edwards · Vacuum controllers
    Refurbished, Used On request
  • D372-72-801 Extension cable (display/interface), 3 m, for Pump Display Terminal Edwards · Other parts
    Refurbished, Used On request
  • D372-72-802 Extension cable (display/interface), 5 m Edwards · Other parts
    Refurbished, Used On request
  • D372-72-803 Extension cable (display/interface), 10 m Edwards · Other parts
    Refurbished, Used On request
  • D372-72-804 Extension cable (display/interface), 15 m Edwards · Other parts
    Refurbished, Used On request
  • D372-72-805 Extension cable (display/interface), 25 m Edwards · Other parts
    Refurbished, Used On request
  • D372-80-700 Pump Display Terminal (PDT) Edwards · Other parts
    Refurbished, Used On request
  • D37360310 SPI MicroTIM interface module Edwards · Boards and electronics
    Refurbished, Used On request
  • D37360320 MCM MicroTIM interface module Edwards · Boards and electronics
    Refurbished, Used On request
  • D37360330 TEL MicroTIM interface module Edwards · Boards and electronics
    Refurbished, Used On request
  • D373-60-340 SEMI E73 Micro-TIM Edwards · Other parts
    Refurbished, Used On request
  • D373-60-350 LAM Alliance Micro-TIM Edwards · Other parts
    Refurbished, Used On request
  • D373-60-360 Novellus C3 Micro-TIM Edwards · Other parts
    Refurbished, Used On request
  • D373-60-370 Hitachi Micro-TIM Edwards · Other parts
    Refurbished, Used On request
  • D37360390 MicroTIM configuration storage Edwards · Boards and electronics
    Refurbished, Used On request
  • D37361500 ETIM interface module Edwards · Boards and electronics
    Refurbished, Used On request
  • D37362000 LON TP-1250 interface module Edwards · Boards and electronics
    Refurbished, Used On request
  • D37363000 EtherCAT interface module Edwards · Boards and electronics
    Refurbished, Used On request
  • D37370310 SPI EMS module Edwards · Boards and electronics
    Refurbished, Used On request
  • D37370320 MCM EMS module Edwards · Boards and electronics
    Refurbished, Used On request
  • D37370330 EMS interface module TEL Edwards · Other parts
    Refurbished, Used On request
  • D37370340 EMS interface module Semi E73 Edwards · Other parts
    Refurbished, Used On request
  • D37370350 LAM EMS module Edwards · Boards and electronics
    Refurbished, Used On request
  • D37370360 C3 EMS module Edwards · Boards and electronics
    Refurbished, Used On request
  • D37370370 EMS interface module Hitachi Edwards · Other parts
    Refurbished, Used On request
  • D37370385 RS232 MicroTIM interface module Edwards · Boards and electronics
    Refurbished, Used On request
  • D373-70-526 PDT adaptor, 5-way XLR plug/RJ12 socket Edwards · Other parts
    Refurbished, Used On request
  • D37370591 PDT extension cable, 5-way XLR, 3.0 m Edwards · Other parts
    Refurbished, Used On request
  • D37370592 PDT extension cable, 5-way XLR, 5.0 m Edwards · Other parts
    Refurbished, Used On request
  • D37370595 PDT extension cable, 5-way XLR, 10.0 m Edwards · Other parts
    Refurbished, Used On request
  • D37370596 PDT extension cable, 5-way XLR, 15.0 m Edwards · Other parts
    Refurbished, Used On request
  • D37370597 PDT extension cable, 5-way XLR, 25.0 m Edwards · Other parts
    Refurbished, Used On request
  • D37374000 Pump LON to Ethernet iGateway Edwards · Vacuum controllers
    Refurbished, Used On request
  • D37374500 Pump Serial to Ethernet iGateway Edwards · Vacuum controllers
    Refurbished, Used On request
  • D37376500 Pump Serial to Pump LON and Dual SIM iGateway Edwards · Vacuum controllers
    Refurbished, Used On request
  • D374-20-000 E73+A1+T1 iTIM Edwards · Other parts
    Refurbished, Used On request
  • D374-20-801 Back shell kit, CPC 16/17 socket (SPI Micro-TIM) Edwards · Other parts
    Refurbished, Used On request
  • D374-20-802 Back shell kit, 25w D-type socket (TEL Micro-TIM) Edwards · Other parts
    Refurbished, Used On request
  • D374-20-803 Back shell kit, 15w D-type plug (E73 Micro-TIM) Edwards · Other parts
    Refurbished, Used On request
  • D374-20-804 Backshell Kit Gate Valve Edwards · Other parts
    Refurbished, Used On request