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Edwards spare parts

Spare parts for Edwards rotary vane, scroll and turbomolecular vacuum pumps. Search by part number or browse by instrument series, then request a quote with the condition you need.

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Edwards instrument series

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Edwards parts

4,314 parts

  • D374-21-000 E73+A1+T1+Serial iTIM Edwards · Other parts
    Refurbished, Used On request
  • D374-21-801 Backshell Kit Serial Edwards · Other parts
    Refurbished, Used On request
  • D374-21-802 A1 to Novellus C3 Interface Cable Edwards · Other parts
    Refurbished, Used On request
  • D374-22-000 MCM+L1 iTIM Edwards · Other parts
    Refurbished, Used On request
  • D374-22-801 Back shell kit, 25w D-type plug (LAM Micro-TIM) Edwards · Other parts
    Refurbished, Used On request
  • D37422802 Connector Kit for MCM MicroTIM Edwards · Other parts
    Refurbished, Used On request
  • D374-23-000 MCM+L1+Serial iTIM Edwards · Other parts
    Refurbished, Used On request
  • D37480500 Accessory module AAM Edwards · Other parts
    Refurbished, Used On request
  • D37480550 Accessory module PAM Edwards · Other parts
    Refurbished, Used On request
  • D37480835 Extension lead, 5 m Edwards · Other parts
    Refurbished, Used On request
  • D37488500 Virtual Pump Display Terminal (VPDT) Edwards · Vacuum controllers
    Refurbished, Used On request
  • D37491500 EMS button Edwards · Other parts
    Refurbished, Used On request
  • D37491501 PDT Adaptor Cable Edwards · Other parts
    Refurbished, Used On request
  • D37491502 Accessory module extension cable, 5.0 m Edwards · Other parts
    Refurbished, Used On request
  • D37491735 Main power connector (3-phase supply and PE), iXL120 Edwards · Other parts
    Refurbished, Used On request
  • D385-01-102 Electrical supply cable, 2 m, unterminated Edwards · Other parts
    Refurbished, Used On request
  • D38504110 AGC DIN Mounting Relay Unit Edwards · Vacuum controllers
    Refurbished, Used On request
  • D38650000 AGC Active Gauge Controller, single display, RS232, CM version Edwards · Vacuum controllers
    Refurbished, Used On request
  • D386-50-400 RS232 cable, 3 m, 25-way D type Edwards · Other parts
    Refurbished, Used On request
  • D38650500 RS232 cable, 3 m, 9-way D type Edwards · Other parts
    Refurbished, Used On request
  • D38651000 Active Gauge Controller AGC, single display, RS232, 6 head Edwards · Vacuum controllers
    Refurbished, Used On request
  • D386-51-800 AGC relay expansion board kit Edwards · Boards and electronics
    Refurbished, Used On request
  • D386-52-000 Active Gauge Controller AGC, single display, RS232, 3 head Edwards · Vacuum controllers
    Refurbished, Used On request
  • D38653000 Active Gauge Controller AGC, single display, no RS232, CM version Edwards · Vacuum controllers
    Refurbished, Used On request
  • D386-54-000 Active Gauge Controller AGC, single display, no RS232, 6 head Edwards · Vacuum controllers
    Refurbished, Used On request
  • D386-55-000 Active Gauge Controller AGC, single display, no RS232, 3 head Edwards · Vacuum controllers
    Refurbished, Used On request
  • D38660000 AGC Active Gauge Controller, triple display, RS232, CM version Edwards · Vacuum controllers
    Refurbished, Used On request
  • D38660800 AGC EPROM Upgrade Kit Edwards · Vacuum controllers
    Refurbished, Used On request
  • D38661000 AGC Active Gauge Controller, triple display, RS232, 6 head Edwards · Vacuum controllers
    Refurbished, Used On request
  • D386-62-000 AGC Active Gauge Controller, triple display, RS232, 3 head Edwards · Vacuum controllers
    Refurbished, Used On request
  • D386-65-000 AGC Active Gauge Controller, no display, DeviceNet Edwards · Vacuum controllers
    Refurbished, Used On request
  • D39590000 ADC Standard Edwards · Vacuum controllers
    Refurbished, Used On request
  • D39591500 ADC mk2 Enhanced Edwards · Vacuum controllers
    Refurbished, Used On request
  • D39592000 TAG Turbo and Active Gauge Controller Edwards · Vacuum controllers
    Refurbished, Used On request
  • D39592800 200 W Power Supply Edwards · Power supplies
    Refurbished, Used On request
  • D396-14-026 Backing pump relay connector Edwards · Other parts
    Refurbished, Used On request
  • D396-15-000 EXC300M Turbomolecular Pump Controller Edwards · Vacuum controllers
    Refurbished, Used On request
  • D396-15-062 Logic interface connector for EXC300/300M Controllers Edwards · Other parts
    Refurbished, Used On request
  • D396-16-000 EXC120 turbomolecular pump controller, 90-264 V a.c. Edwards · Vacuum controllers
    Refurbished, Used On request
  • D396-16-382 Logic interface connector for EXC120/120E Controllers Edwards · Other parts
    Refurbished, Used On request
  • D396-17-000 EXC120E Turbomolecular Pump Controller Edwards · Vacuum controllers
    Refurbished, Used On request
  • D396-18-010 Pump-to-Controller Cable 1m Edwards · Vacuum controllers
    Refurbished, Used On request
  • D396-18-030 Pump-to-Controller Cable 3m Edwards · Vacuum controllers
    Refurbished, Used On request
  • D396-18-050 Pump-to-Controller Cable 5m Edwards · Vacuum controllers
    Refurbished, Used On request
  • D396-18-325 Pump-to-controller cable (OEM), 5 m Edwards · Other parts
    Refurbished, Used On request
  • D396-19-010 Pump-to-controller cable, 1 m, for EXT250M Edwards · Other parts
    Refurbished, Used On request
  • D396-19-030 Pump-to-controller cable, 3 m, for EXT250M Edwards · Other parts
    Refurbished, Used On request
  • D396-19-050 Pump-to-controller cable, 5 m, for EXT250M Edwards · Other parts
    Refurbished, Used On request