Edwards spare parts
Spare parts for Edwards rotary vane, scroll and turbomolecular vacuum pumps. Search by part number or browse by instrument series, then request a quote with the condition you need.
Guides
Edwards instrument series
- Edwards RV205 parts
- Edwards E2M683 parts
- Edwards XDS77 parts
- Edwards nXDS40 parts
- Edwards EcoDry
- Edwards EXT and nEXT204 parts
- Edwards TIC42 parts
- Edwards Active Gauges175 parts
- Edwards iH, iL, iQDP and iXM Dry Pumps429 parts
- Edwards EH Mechanical Boosters377 parts
- Edwards T-Station Pumping Stations6 parts
- Edwards Valves312 parts
- Edwards Diffusion Pumps170 parts
- Edwards EPX and EPS91 parts
- Edwards GXS34 parts
- Edwards iXL and iXH48 parts
- Edwards STP50 parts
Edwards parts by category
- Boards and electronics 23
- Cryopumps 2
- Dry vacuum pumps 440
- Emitters and filaments 2
- Ion sources and interfaces 4
- Leak detectors 36
- Mass spectrometer components 12
- Other parts 1100
- Power supplies 2
- Rotary vane pumps 311
- Seals and consumables 772
- Tubing and fittings 656
- Turbomolecular pumps 126
- Vacuum controllers 92
- Vacuum gauges 177
- Vacuum pumps 273
- Valves 286
Edwards parts
4,314 parts
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D396-20-000 EXC100E turbomolecular pump controller, 90-264 V a.c.Refurbished, Used On request
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D396-20-325 Pump-to-controller cable (OEM), 5 mRefurbished, Used On request
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D396-22-000 EXC100L turbomolecular pump controller, 90-264 V a.c.Refurbished, Used On request
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D396-35-000 EXC250E Turbomolecular Pump ControllerRefurbished, Used On request
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D396-36-000 EXC250L Turbomolecular Pump ControllerRefurbished, Used On request
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D396-40-000 EXDC80 drive module for EXT turbomolecular pumpsRefurbished, Used On request
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D396-41-000 EXDC160 Drive Module for EXT Turbomolecular PumpRefurbished, Used On request
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D396-46-600 EXDC160 Drive Module, 24 V, 45 degRefurbished, Used On request
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D39700000 TIC Instrument Controller 3 Head RS232/RS485Refurbished, Used On request
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D39700803 TIC Front Bezel KitRefurbished, Used On request
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D39700804 TIC Relay Box 3 x 240 V 3 ARefurbished, Used On request
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D39700805 TIC relay box instrumentsRefurbished, Used On request
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D397-00-822 TIC Front Panel AssemblyRefurbished, Used On request
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D39700831 Mains Cable IEC320 M/F, 2 mRefurbished, Used On request
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D39700833 2 m Logic Interface Cable for TICRefurbished, Used On request
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D39700834 TIC RS232 Interface Cable 2mRefurbished, Used On request
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D39700835 1 m DX/EXDC Extension Cable (16/0.2)Refurbished, Used On request
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D39700836 3 m DX/EXDC Extension Cable (16/0.2)Refurbished, Used On request
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D39700837 5 m DX/EXDC Extension Cable (16/0.2)Refurbished, Used On request
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D397-00-850 TIC Logic InterfaceRefurbished, Used On request
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D39701000 TIC Instrument Controller 6 Head RS232/RS485Refurbished, Used On request
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D39701804 TIC Relay Box Instruments (6 x 5 A, 250 V)Refurbished, Used On request
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D39702000 TIC Instrument Controller 6 Head CapmanRefurbished, Used On request
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D397-11-000 TIC Turbo Controller (100 W)Refurbished, Used On request
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D39711805 TIC Relay Box for Small Backing PumpRefurbished, Used On request
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D397-12-000 TIC Turbo Controller (200 W)Refurbished, Used On request
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D397-21-000 TIC Turbo and Instrument Controller (100 W)Refurbished, Used On request
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D397-22-000 TIC Turbo and Instrument Controller (200 W)Refurbished, Used On request
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D39750016 TIC Profibus RS232 Cable (0.3 m)Refurbished, Used On request
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D39750835 TIC Profibus 24V Cable (0.3 m)Refurbished, Used On request
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D39750836 IC Profibus Upgrade Cable (2 m)Refurbished, Used On request
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D39751000 DX Pump Profibus Communications ModuleRefurbished, Used On request
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D39751830 DX/nEXT Profibus Spare Fuse (x2)Refurbished, Used On request
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D39751831 DX/nEXT Profibus Upgrade Cable (2 m)Refurbished, Used On request
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D39753000 Profibus moduleRefurbished, Used On request
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D39754000 TIC Profibus Communications ModuleRefurbished, Used On request
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D39755000 DX/nEXT Pump Profibus Communications ModuleRefurbished, Used On request
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D39801810 USB Interface CableRefurbished, Used On request
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D39803014 NXRi TIC CableRefurbished, Used On request
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D40001005 0.5M Active Gauge CableRefurbished, Used On request
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D40001010 1M Active Gauge CableRefurbished, Used On request
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D40001030 3M Active Gauge CableRefurbished, Used On request
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D40001050 5M Active Gauge CableRefurbished, Used On request
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D40001100 10M Active Gauge CableRefurbished, Used On request
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D40001150 15M Active Gauge CableRefurbished, Used On request
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D40001250 25M Active Gauge CableRefurbished, Used On request
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D40001500 50M Active Gauge CableRefurbished, Used On request
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D40001999 100M Active Gauge Cable AssemblyRefurbished, Used On request